Deformable Mirror with Variable Curvature and Method for Manufacturing Such a Mirror

ABSTRACT

A deformable mirror with variable curvature including: a plate having a reflective face and opposite hidden face and whose shape has a center (C) and radiuses (r), and at least one actuator intended to exert a force on the hidden face in order to deform the plate. The plate comprises a plurality of primary and secondary portions. The secondary portions being interposed between the primary portions, each of the primary portions extending locally substantially along and on either side of a respective radius (r′) among said radiuses (r), and having a stiffness different from the adjacent secondary portions. The deformable mirror is intended to the introduction or the correction of an optical aberration in a light beam.

The present invention concerns the general field of deformable mirrorsused in adaptive optical systems, for various applications such asastronomy, medicine, in particular ophthalmology, the use of lasers,microscopy, microelectronics, etc.

More particularly, the present invention relates to a deformable mirrorincluding on the one hand a plate having a reflective face and anopposite hidden face and whose shape has a center and radiuses, and onthe other hand at least one actuator intended to exert a force on saidhidden face in order to deform said plate.

The present invention also concerns a method for manufacturing such amirror.

It is known to use deformable mirrors in order to simulate or correctoptical aberrations, that is to say irregularities of the wavefront of alight beam producing for example an astigmatism, for example bygenerating concavities or convexities at the surface of such a mirror,in particular circular.

Such mirrors comprise a flexible plate including a reflective face andan opposite hidden face, said hidden face being linked to severalactuators intended to locally maneuver said plate back and forth, andtherefore modify the optical path traveled by the different raysconstituting the light beam being reflected on the reflective face ofsaid plate. Thus, it is possible to compose the phase shifts at theorigin of the deformation of the wavefront.

However, such known mirrors have the drawback of requiring a largenumber of actuators, thereby making such mirrors complex to install, andthat even for imparting a simple deformation of said mirrors such as thegeneration of a concave or convex curvature, and generating aconsiderable manufacturing cost as well as some fragility, themalfunction of one single actuator may result in a deformation defect ofsaid deformable plate. In addition, the linkages of said numerousactuators with said hidden face are relatively complex to make and havea limited service life, thereby further increasing the costs, andcausing considerable downtime periods to repair these linkages. Saiddowntime periods are further worsened by the time spent in changing oneof the multiple actuators that has broken down.

It is also known to use optical systems comprising a circular deformablemirror and one single actuator which is of the suction/compression type,involving a fluid in contact with a hidden face of the mirror, ormechanical, involving a screw in contact with said hidden face. Such amirror comprises a circular deformable plate having a particularthickness profile, said thickness decreasing from the center of saidmirror up to its periphery in a continuous and axially symmetricalmanner, according to one or several mathematical formulas comprisingfactors such as: the type of actuator and of the mirror support, theradius of said circular mirror, etc.

However, such a configuration is difficult and complex to implement,this type of system remaining difficult to make in an accurate manner,in particular said particular thickness profile of said plate. Indeed,said mathematical formula on which the latter is based is extremelycomplex and includes numerous factors, including the type of actuatorand the general support configuration, as well as the radius of saidcircular mirror, which increases the risk of error during themanufacture of such a mirror. It is difficult and expensive to make amirror having this particular plate thickness profile according to suchspecific mathematical formula, by reducing the thickness of said platein an accurate manner according to the radius of said circular mirror.Finally, such optical systems are expensive to make, on the one handbecause of the method for making said thickness profile, and on theother hand because of the scrap rate of mirrors in which the thicknessprofile does not perfectly corresponds to the mathematical formula, theapplications of the deformable mirrors generally requiring a highaccuracy of manufacturing.

It is also known to use optical systems comprising a circular deformableplate and one single mechanical actuator intended to pull or push saidplate at its center in order to deform it, said plate having a thicknesswhich decreases from its center up to its circular edge in an axiallysymmetrical staggered and continuous manner, like stairs steps.

However, such a configuration is difficult and complex to implement forthe same reasons as previously stated. Indeed, said steps, carved in thethickness of said plate, are difficult and expensive to make, increasingthe scrap rate of mirrors in which one of the steps has not been madeaccurately, for example a too wide or a too thick step.

Consequently, the objects assigned to the invention aim at overcomingthe different drawbacks enumerated in the foregoing and at providing anew deformable mirror which is reliable, compact, and whose manufactureis inexpensive and barely complex.

Another object of the invention aims at providing a new deformablemirror with a simple and robust structure.

Another object of the invention aims at providing a new deformablemirror whose setting within an optical system is easy, rapid and cheap.

Another object of the invention aims at providing a new deformablemirror capable of focusing or defocusing an optical beam accurately andrapidly.

Another object of the invention aims at providing a new deformablemirror easily adaptable according to the introduction or the correctionof the optical aberration that is desired to be obtained.

Another object of the invention aims at providing a new deformablemirror particularly adapted to generate a curvature such as a concavityor a convexity.

Finally, an object of the invention aims at providing a new deformablemirror which requires only a limited number of actuator(s) to beimplemented within an optical system.

The objects assigned to the invention are achieved by means of adeformable mirror including on the one hand a plate having a reflectiveface and an opposite hidden face and whose shape has a center andradiuses, and on the other hand at least one actuator intended to exerta force on said hidden face in order to deform said plate, characterizedin that said plate comprises a plurality of primary and secondaryportions, said secondary portions being interposed between said primaryportions, each of said primary portions extending locally substantiallyalong and on either side of a respective radius among said radiuses andhaving a stiffness different from that of said adjacent secondaryportions.

The objects assigned to the invention are also achieved by means of amethod for manufacturing a deformable mirror, characterized in that itincludes:

-   -   on the one hand, at least one step of making a plate having a        reflective face and an opposite hidden face and whose shape has        a center and radiuses, said plate comprising a plurality of        primary and secondary portions, said secondary portions being        interposed between said primary portions, each of said primary        portions extending locally substantially along and on either        side of a respective radius among said radiuses and having a        stiffness different from that of said adjacent secondary        portions, and    -   on the other hand, at least one step of setting in place at        least one actuator intended to exert a force on said hidden face        in order to deform said plate.

Other particularities and advantages of the invention will appear andcome out in more details upon reading the description made hereinafter,with reference to the appended drawings, given only as an illustrativeand non-limiting example, in which:

FIG. 1 illustrates, according to a perspective view, a deformable mirroraccording to a first embodiment of the invention, said mirror beingviewed from its hidden face side.

FIG. 2 illustrates, according to a front view, the hidden face of adeformable mirror according to a second embodiment of the invention,with only one primary portion represented.

FIG. 3 illustrates the hidden face of a deformable mirror according to athird embodiment of the invention, with only one primary portionrepresented.

FIG. 4 illustrates, according to a front view, the hidden face of adeformable mirror according to a fourth embodiment of the invention.

FIG. 5 illustrates, according to a front view, the hidden face of adeformable mirror according to a fifth embodiment of the invention, withonly one primary portion represented.

According to a first aspect, illustrated in FIGS. 1 to 5, the inventionconcerns a deformable mirror 1.

In particular, the mirror 1 is intended to be used in a system requiringthe use of adaptive optics, for example an astronomical observationsystem or an ophthalmological imaging system. In particular, the mirror1 is intended to introduce or correct an optical aberration in a lightbeam.

According to the present invention, and as represented in FIG. 1, themirror 1 includes a plate 2 having a reflective face 4 and an oppositehidden face 5. Preferably, said reflective face 4 is locally parallel tosaid hidden face 5, said reflective 4 and hidden 5 faces lying on facesof said plate 2 opposite to each other.

Advantageously, in the absence of any external influence, said plate 2has a substantially planar general shape, or slightly cambered, that isto say convex (or slightly concave, depending on the point of view), andpreferably includes at least one finished edge 3. Said convexity (orconcavity, depending on the point of view) of said plate 2 is preferablyslight enough, that is to say having a relatively considerable radius ofcurvature in comparison with the dimensions of said plate 2, such thatthe surface of said cambered plate 2 may be assimilated, locally (thatis to say over a fraction of the surface area of said plate 2), to aplanar surface.

Preferably, in the absence and/or in the presence of an externalinfluence, said plate 2 has a substantially planar or slightly camberedgeneral shape, possibly with a convexity or concavity slight enough tobe invisible or barely noticeable to the naked eye, said convexity orconcavity of the plate 2 being for example too reduced for the plate 2to form a significant portion of a sphere, such as for example a half, athird, a quarter or a fifth or more of a sphere. In any case,preferably, the convexity or concavity of the plate 2 would not delimita significant internal space.

Preferably, said plate 2 is manufactured from a relatively flexiblematerial, but still having some mechanical strength, such that it isbarely deformed, or not at all, as long as it is not subjected to asufficient external pressure or tension. Hence, said plate 2advantageously presents an intrinsic mechanical strength, is not flabby,and still presents enough flexibility to undergo a slight elasticdeformation, that is to say reversible, in particular when it is biasedin flexion.

Advantageously, said plate is a thin, deformable plate, which isdeformed in particular by the action of an external force exerted at itssurface, in particular a force exerted by an actuator.

Advantageously, the plate 2 has an average thickness smaller than orequal to 50 μm, preferably smaller than or equal to 10 μm, and evensubstantially comprised between 3 μm and 5 μm. Preferably, with regardsto the function intended by the invention, the plate 2 has a relativelysmall size, and has for example a diameter smaller than or equal to 30mm, preferably smaller than or equal to 20 mm, still more preferablysmaller than or equal to 15 mm.

Preferably, said plate 2 is essentially made of silicon, of metal (forexample of steel or aluminum), of an alloy, of polymer(s), of compositematerial(s), of ceramic(s), or by an assembly of several differentmaterials, in particular among the aforementioned materials.

Advantageously, when subjected to an external pressure or tension, forexample a central pressure or tension, said plate 2 is deformed so as togenerate, when said plate 2 is made substantially planar, a convexity(or concavity, depending on the point of view), or still, when saidplate is made substantially cambered or convex, so as to accentuate aconvexity (or concavity, depending on the point of view), or stillreduce a convexity (or concavity, depending on the point of view). Forexample, when said plate 2 is made substantially cambered or convex (orconcave, depending on the point of view), a sufficient external pressureor tension applied at the appropriate location(s) of said plate 2, maymake said plate 2 substantially planar, as long as said pressure ortension is exerted.

According to the present invention, and as represented in the figures,the shape of said plate 2 has a center C and radiuses r.

Preferably, said center C is a geometric center of said shape of saidplate 2, for example a center of gravity and/or a barycenter.

Preferably, each of said radiuses r is a segment whose first end iscoincident with said center C, and whose second end is a peripheral endpoint P, that is to say a point of an edge 3 of said plate 2.

Advantageously, and as illustrated in the figures, said shape of saidplate 2 is substantially circular or elliptical. In the case of acircular shaped plate 2, all of said segments have substantially thesame length, said plate 2 being in the form of a disc, and the edge 3 ofsaid plate 2 describing a circle.

Alternatively, said shape of said plate 2 is triangular, rectangular,square, trapezoidal, or any other appropriate polygonal geometry.

Preferably, when said plate 2 is slightly cambered (concave or convexdepending on the point of view), said shape of said plate 2 isassimilated to the aforementioned characteristics when said camberedplate 2 is laid flat.

Preferably, said reflective face 4 has a substantially smooth surface,intended to reflect a light beam, and to introduce an optical aberrationor correct it when said mirror 1 is actively deformed. Thus, saidreflective surface 4 advantageously consists of a joint surface, devoidof any unevenness or asperity, and is preferably intended to receive anincident light beam and reflect it in the form of a reflected light beampresenting either an optical aberration inexistent in the incident beam,or a correction of an optical aberration present in the incident beam,or both.

Said hidden face 5 is preferably intended to undergo pressures ortensions allowing deforming said plate 2 in an appropriate manner, thatis to say in a satisfactory manner such that the mirror 1 fulfills itsfunction in an adaptive optics system.

Thus, said plate 2 advantageously presents a flat or slightly camberedshape, having two reflective 4 and hidden 5 faces which are opposite toeach other and which are separated by the thickness of said plate 2,said thickness being preferably relatively small in comparison with thedimension of extension of said faces 4, 5 of said plate 2.

Said reflective 4 and hidden 5 faces of said plate 2 are preferably madeintegrally with said plate 2, for example machined in the same material.

Alternatively, said plate 2 is constituted by several plate portionsattached and bonded to each other, one of the plate 2 portionscomprising for example the reflective face 4, and another one of theplate 2 portions comprising for example the hidden face 5.

According to the present invention, the deformable mirror 1 alsoincludes at least one actuator (not represented) intended to exert aforce on said hidden face 5 in order to deform said plate 2. In otherwords, said deformable mirror 1 comprises at least one actuator,designed to exert a pressure or a tension on said plate 2 at said hiddenface 5 side, so as to effectively deform said plate 2 in order tointroduce or correct an optical aberration of a light beam reflected bysaid reflective face 4, more specifically by locally deforming thecurvature of said plate 2 (and therefore more generally the curvature ofthe mirror or more exactly the curvature of its reflective face 4). Thisresults in that said curvature varies, at least locally, according tothe force exerted by said actuator on said hidden face 5.

Advantageously, said actuator is designed to apply said force at saidcenter C.

Preferably, said force is exerted according to a direction locallysubstantially perpendicular to said reflective surface 4.

Preferably, the deformable mirror 1 further comprises a fixed support onwhich said plate 2 bears peripherally, said fixed support beingpreferably linked to a frame. Nonetheless, even though it rests on saidsupport, the plate 2 is advantageously sufficiently rigid and solid suchthat there is no need to adjoin a holding structure, for example aframework, thereto in order to guarantee its intrinsic mechanicalstrength. In other words, the plate 2 ensures, preferably by its ownconstruction, its intrinsic mechanical strength, without requiring anyframework, hatch, skeleton or any other stiffening structure.

Alternatively, said deformable mirror 1 comprises peripheral actuators(alone or in combination with said fixed support) on which said plate 2bears peripherally.

Advantageously, said actuator(s) may be of any type (piezoelectricactuator, magnetic actuator, two-part actuator, mechanical actuator,screw actuator, etc.), known to those skilled in the art. For example,said actuator is linked to said hidden face 5 via a bonding point, andtransmits a tensile or pressure force locally at the surface of saidhidden face 5 so as to deform said plate 2, said force preferably beinglocally substantially transverse to said reflective face 4.

Advantageously, said plate 2 includes at least one edge 3 which iseither attached to said fixed support, or linked, in turn, to one orseveral actuator(s), or a combination of both (that is to say that someportions of said edge 3 are linked to actuators, whereas other portionsof said edge 3 are linked to said fixed support).

FIGS. 1 to 5 illustrate the hidden face 5 of a deformable mirror 1 inthe absence of said actuators and said frame.

Preferably, said mirror 1 comprises only one actuator or a limitednumber of actuators, for example one, two or three, to fill its adaptiveoptical function, that is to say to introduce or correct an opticalaberration in a light beam.

For example, said hidden face 5 is intended to be subjected to thetension and/or the pressure of an actuator or set of actuators,preferably one single central actuator or a set of central actuators,that is to say one single actuator or a set of actuators exerting aforce on said plate 2 in an area concentrated on and/or around saidcenter C.

According to another example, said hidden face 5 is intended to besubjected to the pressure and/or the tension of a fluidpressure/depression type actuator, said pressure or depression beinggenerated within said support so as to create, at the reflective faceside, respectively a convexity or a concavity of said plate 2.

According to still another example, said hidden face is intended to besubjected to a plurality of actuators evenly distributed on the hiddenface 5, that is to say regularly linked to said hidden face 5, thedensity of actuators/hidden face 5 linkages being almost equal over theentirety of said hidden face 5.

According to the present invention, said plate 2 comprises a pluralityof primary 6 and secondary 7 portions, said secondary portions 7 beinginterposed between said primary portions 6. In other words, said plate 2is divided into an alternation of primary 6 and secondary 7 portions.Advantageously, each of said primary portions 6 is bordered by at leasttwo secondary portions 7, and conversely, each of said secondaryportions 7 is bordered by at least two primary portions 6. Preferably,said primary 6 and secondary 7 portions occupy at least one portion ofthe surface area of said hidden face 5, and more preferably, they occupythe whole surface area of said hidden face 5. Thus, each of said primary6 and secondary 7 portions advantageously presents a surface areasmaller than the total surface area of said hidden face 5, and each ofsaid plurality of primary portions 6 and said plurality of secondaryportions 7 presents a surface area smaller than the total surface areaof said hidden face 5.

Preferably, said plate 2 comprises as many primary portions 6 assecondary portions 7.

According to the present invention, and as illustrated in the figures,each of said primary portions 6 extends locally substantially along andon either side of a respective radius r′ among said radiuses r. In otherwords, said primary portion 6 has a substantially elongate shape, whichfollows, at least over a significant portion, a respective radius r′among said radiuses r of said plate 2, said respective radius r′advantageously splitting said primary portion 6 into at least twoportions 6 a, 6 b. In the following, for clarity, «said» primary portion6, in the singular, will refer to the primary portion 6, among saidprimary portions 6, that is associated to said aforementioned respectiveradius r′, each of said other primary portions 6 being associated to adifferent respective radius r′ (that is to say a different respectiveradius r′ for each primary portion 6, said respective radiuses r′ havingpreferably the same length), and advantageously presenting the samecharacteristics described hereinafter as said primary portion 6. Thus,for example, the expressions «each of said primary portions 6» and «saidprimary portion 6» are equivalent. Preferably, all of said primaryportions 6 are similar, except their spatial positioning.

Preferably, and as illustrated in the figures, said respective radius r′splits said primary portion 6 into two portions 6 a, 6 b, advantageouslyhaving substantially equal surface areas. Still more preferably, saidportions 6 a, 6 b are substantially symmetrical, said respective radiusr′ forming their axis of symmetry.

Preferably, and as represented in the figures, said respective radius r′is completely inscribed within said primary portion 6. Alternatively,only one fraction of said respective radius r′ is inscribed within saidprimary portion 6, said fraction of said respective radius r′ beingadvantageously continuous, that is to say comprising only one section.

Advantageously, and as illustrated in FIGS. 1 and 4, said primaryportions 6 are evenly distributed angularly around said center C. Inother words, each of said primary portions 6 preferably extend along adifferent respective radius r′, the angle separating two adjacentrespective radiuses r′ being always substantially the same.

Advantageously, and as illustrated in FIGS. 1 and 4, said deformablemirror 1 comprises at least eight primary portions 6, preferably atleast ten primary portions 6. For example, and as represented in FIGS. 1and 4, said deformable mirror 1 comprises eight primary portions 6 andtherefore eight respective radiuses r′, each of said eight respectiveradiuses r′ being separated from the adjacent respective radius r′ by anangle of about 45 degrees.

According to the present invention, and as illustrated in the figures,each of said primary portions 6 has a stiffness different from that ofsaid adjacent secondary portions 7. In other words, said primary portion6 of said plate 2 is more difficult or easier to deform than thebordering secondary portions 7 and which are preferably at least in thenumber of two. This means that each primary portion 6 has an elasticdeformation resistance different from that of the adjacent secondaryportions 7. Still in other words, said primary portion 6 is a portion ofsaid plate 2 which is more or less easier to deform, in particular bybending, by the action of said actuator(s), than another plate 2 portioncomprising said secondary portions 7 adjacent to said primary portion 6.As a corollary, each secondary portion 7 advantageously has a stiffnessdifferent from that of said adjacent primary portions 6.

Advantageously, each of said secondary portions 7 adjacent to saidprimary portion 6 has the same stiffness.

Preferably, all of said primary portions 6 have the same primarystiffness, and all of said secondary portions 7 have the same secondarystiffness, said primary and secondary stiffnesses being substantiallydifferent from each other.

According to a variant of the invention, and as illustrated in FIG. 1,said primary portion 6 has a stiffness higher than that of said adjacentsecondary portions 7.

According to another variant of the invention, and as represented inFIG. 4, said primary portion 6 has a stiffness lower than that of saidadjacent secondary portions 7.

Preferably, and as represented in the figures, said primary portion 6presents a thickened surface or a thinned surface with regards to saidadjacent secondary portions 7.

Thus, FIG. 1 illustrates a deformable mirror 1 whose primary portion 6presents a thickened surface, whereas FIG. 4 illustrates a deformablemirror 1 whose primary portion 6 presents a thinned surface. Each ofFIGS. 2, 3 and 5 illustrates a deformable mirror 1 whose primary portion6 may be either in relief, thereby presenting a thickened surface, orrecessed, thereby presenting a thinned surface.

Preferably, said thickened surface or thinned surface of said primaryportion 6 confers it with a stiffness respectively higher or lower thansaid secondary portions 7 adjacent to said primary portion 6. Forexample, FIG. 1 illustrates a mirror 1 wherein the higher stiffness ofsaid primary portion 6 in comparison with that of said adjacentsecondary portions 7 is obtained by means of the thickened surface ofsaid primary portion 6 with regards to said adjacent secondary portions7.

Preferably, a machining of said plate 2 is performed at said hidden face5 side in order to form at least partially said thickened surface orsaid thinned surface. Thus, in particular in the case where said primaryportion 6 is desired to present a thickened surface, it is proceeded forexample to a machining of said secondary portions 7 adjacent to saidprimary portion 6. On the contrary, in the case where said primaryportion 6 is desired to present a thinned surface, it is proceeded to amachining of said primary portion 6. Preferably, when the primaryportion 6 is machined, it presents a stiffness lower than that of saidsecondary portions 7 adjacent to said primary portion, and conversely,when said secondary portions 7 adjacent to said primary portion 6 aremachined, said primary portion 6 presents a stiffness higher than thatof the secondary portions 7 adjacent to said primary portion 6.

Alternatively, said thickened surface is formed at least partially by adeformable slice attached, for example bonded, on said plate 2, therebyforming said primary portion 6. Preferably, said slice is made of thesame material as that of the rest of the plate 2. Alternatively, saidslice is made of a flexible material different from that of the rest ofsaid plate 2. In general, said slice (and actually said thickenedsurface) is preferably intended to increase the stiffness of saidprimary portion 6. For example, said thickened surface is formed by adeformable slice attached on said plate 2, thereby forming said primaryportion 6, and through a machining of the adjacent secondary portion 7.

Said thickened surface or said thinned surface may also be made throughany appropriate method, for example through a selective etching, aselective deposition, etc., either of said primary portion 6, or of saidadjacent secondary portions 7. Said thickened surface or said thinnedsurface may also be made through a combination of the aforementionedmethods and means, for example by bonding a slice on the primary portion6 followed by a machining of said secondary portions 7 adjacent to saidprimary portion 6.

Alternatively, and as illustrated in FIGS. 1 and 3, said primary portion6 presents a continuous structure. In other words, said primary portion6 is not formed by isolated sparse points, but rather preferablypresents a substantially smooth and locally flat surface. Thus, anexample of such a continuous structure is illustrated in FIGS. 1 and 3,where said primary portion 6 advantageously further presents apetal-like or spindle-like general shape, said petal being preferablymade in one piece.

According to another alternative illustrated by the embodiments of theinvention of FIGS. 2, 4 and 5, said primary portion 6 presents adiscrete structure. In other words, said primary portion 6 presents astructure formed by sparse points, isolated from each other.

Examples of such a discrete structure are illustrated in FIGS. 4 and 5,where said primary portion 6 includes a set of cavities 9, 10 orprotrusions 11 formed across its thickness, so as to confer said primaryportion (6) with said stiffness different from that of said adjacentsecondary portions (7).

In particular, FIG. 4 illustrates a mirror 1 whose primary portion 6 hasa set of cavities 9 evenly distributed over the surface of said primaryportion 6, said cavities 9 reducing the stiffness of said primaryportion 6 in comparison with said adjacent secondary portions 7. Saidcavities 9 of said primary portion 6 confers it with a discontinuous ordiscrete character, as well as a thinned surface with regards to saidsecondary portions 7 adjacent to said primary portion 6. In practice,the stiffness of said primary portion 6 of the mirror 1 illustrated inFIG. 4 is lower than that of said secondary portions 7 adjacent to saidprimary portion 6.

In particular, FIG. 5 illustrates a mirror 1 whose primary portion 6 hasa set of cavities 10 or protrusions 11 (the black dots may represent thefirst ones or the second ones), irregularly distributed over the surfaceof said primary portion 6, said cavities 10 or protrusions 11respectively reducing or increasing the stiffness of said primaryportion 6 in comparison with said adjacent secondary portions 7. Theadvantageously irregular distribution of said cavities 10 or of saidprotrusions 11, which are for example distributed in a more dense mannerclose to said center C than an edge 3 of said plate 2, confers saidprimary portion 6 with a stiffness closer to that of said adjacentsecondary portions 7 at the location where the cavities or protrusions11 are distributed in a least dense manner (that is to say in thisinstance said center C), and conversely, said irregular distributionconfers said primary portion 6 with a stiffness farther than that ofsaid adjacent secondary portions 7 at the location where the cavities 10or protrusions 11 are distributed in a most dense manner (that is to sayin this instance an edge 3). Preferably, said cavities 10 or protrusions11 are relatively small, that is to say with an individual surface areasignificantly smaller than the total surface area of said hidden face 5,preferably at least 10 times smaller, still more preferably at least 20times smaller, still more preferably at least 50 times smaller.

Another example of such a discrete structure is illustrated inparticular in FIG. 2, where said primary portion 6 also presents apetal-like or spindle-like general shape, said shape of said primaryportion 6 being divided into several elongate and curved tabs 8, havinga width (which remains constant or which varies) and a length, distinctand spaced apart from each other, except at their respective ends wherethey meet, said ends herein consisting on the one hand of said center Cand on the other hand of a peripheral end point P of said plate 2. Inpractice, said tabs 8 preferably consist of thickened surfaces orthinned surfaces formed in said plate 2 at its hidden face side.

According to another embodiment, said primary portions 6 are formed byportions of said plate 2 which have undergone an alteration of thephysical properties of the material(s) constituting said plate 2 therebymodifying the stiffness thereof.

According to still another embodiment (not illustrated in the figures),each primary portion 6 is formed from one or several material(s) whereaseach secondary portion 7 is formed from one or several material(s), saidfirst and second material(s) having different stiffnesses. Hence, inthis case, the difference in stiffness is obtained through theimplementation of different materials to form the primary 6 andsecondary 7 portions, so that the plate 2 presents a compositecharacter.

Preferably, and as illustrated in the figures, said primary portion 6also has a dimension L which is locally substantially transverse to saidrespective radius r′ and parallel to said reflective face 4 and whichvaries along said respective radius r′. In other words, said primaryportion 6, which locally extends substantially along said radius r′ andthus has a length smaller than or equal to said respective radius r′,also has a width which is locally substantially perpendicular to saidlength, which extends over the plate 2, which is locally perpendicularto the local direction of extension of the thickness of said plate 2,and which varies. Herein, the terms «locally» and «local» may be used toconsider the dimensions from a restrained or closer point of view, thatis to say in order to approximate a locally substantially flat plate 2when said deformable mirror 1 is slightly cambered (concave or convex).In practice, the primary portion 6 modifies significantly and in adifferentiated manner the radial rigidity or stiffness of said plate 2,which is more difficult or easier to deform according to its respectiveradius r′; in other words, to deform a portion of said plate 2, using anactuator, by bringing a portion of said plate 2 comprising a segment ofa respective radius r′ close to or away from another portion of saidplate 2 comprising the rest of the respective radius r′.

Alternatively, said transverse dimension L remains substantiallyconstant all along said respective radius r′.

Preferably, and as illustrated in the figures, said transverse dimensionL increases, starting from said center C, outwardly, along saidrespective radius r′, up to a primary point A located on said respectiveradius r′ and at a distance from said center C.

Alternatively, said transverse dimension L decreases, starting from saidcenter C, outwardly, along said respective radius r′, up to a tertiarypoint located on said respective radius r′ and at a distance from saidcenter C.

Preferably, the transverse dimension L, along the respective radius r′,varies in a significant, controlled, continuous and regular manner.

Preferably, the transverse dimension L has a minimum value and a maximumvalue between which it varies. Advantageously, the difference betweenthe minimum and maximum values is significant, controlled, that is tosay determinate and not random, and amounts for example to at least 5%,preferably at least 10%, and even at least 30%, or still for example atleast 50% of the length of the respective radius r′. Preferably, thetransverse dimension L varies so that the associated primary portion 6forms a significant and coherent set, that is to say having a size, asurface, a surface area which is determinate and non-negligible incomparison with the dimensions of the plate 2. Advantageously, saidvariation of said transverse dimension L does not result from anincident, an error, or an approximation in the construction of thedeformable mirror 1, in particular of said plate 2, and moreparticularly of the primary portion 6 associated to said transversedimension L.

Advantageously, the distance between said center C and said primarypoint A (or alternatively said tertiary point) represents, asillustrated in FIGS. 1 to 3, at least 30%, preferably at least 50%, oras represented in FIGS. 4 and 5, still more preferably at least 80%, orstill more preferably the entirety of the length of said respectiveradius r′. Advantageously, this last example may be understood as anincrease (or alternatively a decrease), preferably continuous, of saidtransverse dimension L from the center C up to an edge 3 of said plate 2(or alternatively, an edge 3 or a peripheral end point of saidrespective radius r′), in particular in the case of a circular orelliptical shaped plate 2.

Alternatively, and in particular when said transverse dimension L onlyincreases, continuously, from said center C, outwardly, all along saidrespective radius r′, said primary portion 6 is formed by a respectivecircular sector of said plate 2.

Preferably, and as illustrated in FIGS. 1 to 3, said transversedimension L increases, starting from a peripheral end point P of saidrespective radius r′ and/or from an edge 3 of said plate 2 toward saidcenter C (that is to say toward the interior of said plate 2), alongsaid respective radius r′, up to a secondary point B located on saidrespective radius r′ and at a distance from said peripheral end point Pand/or said edge 3.

Preferably, and as illustrated in FIGS. 1 to 3, the distance betweensaid peripheral end point P and/or said edge 3 and said secondary pointB represents at least 30%, more preferably at least 50% of the length ofsaid respective radius r′.

Alternatively, said transverse dimension L decreases, starting from anedge 3 of said plate 2, toward said center C, along said respectiveradius r′, up to a quaternary point D located on said respective radiusr′ and at a distance from said edge 3. According to a particularexample, and as illustrated in FIGS. 4 and 5, the quaternary point D iscoincident with said center C, said transverse dimension L decreasingfrom said edge 3 up to the center C along said respective radius r′;which is equivalent to the case where said transverse dimension Lincreases, starting from said center C, up to an edge 3 of said plate 2.

Preferably, said edge 3 is secant to said respective radius r′. Stillmore preferably, said edge 3 is split into two portions with the samelengths, and symmetrical, by said respective radius r′.

According to a variant of the invention, and as illustrated in FIGS. 1to 3, said primary point A and said secondary point B are coincident.

According to another variant of the invention, not illustrated, saidprimary point A and said secondary point B are not coincident.Advantageously, said transverse dimension L, along said respectiveradius r′, remains substantially constant between said primary A andsecondary B points.

Thus, in the aforementioned last two variants, and, regardless of thedirection, said transverse dimension L increases and then decreasesalong said respective radius r′, starting from one end of saidrespective radius r′ to the other (for example said center C and aperipheral end point P).

According to still another variant of the invention, not illustrated,said tertiary point and said quaternary point D are coincident.

According to still another variant of the invention, not illustrated,said tertiary point and said quaternary point D are not coincident.

For this last variant, for example, said transverse dimension L, alongsaid respective radius r′, remains substantially constant between saidtertiary and quaternary D points.

Thus, in the aforementioned last two variants, said transverse dimensionL decreases and then increases along said respective radius r′, startingfrom one end of said respective radius r′ to the other (for example saidcenter C and a peripheral end point P), and this, regardless of thedirection.

Preferably, said transverse dimension L, considered at a point F of saidrespective radius r′, satisfies the equation: L=L₀*N²*In(N²), where N isthe ratio between, on the one hand, the distance CF between said centerC and said point F, and, on the other hand, the total length of saidrespective radius r′, L₀ being a constant adjusted according to thenumber of primary portions 6 so that the latter do not overlap.

Of course, any combination of the aforementioned different variants andexamples is possible, as it seems relevant to a person skilled in theart wishing to make an appropriate deformable mirror.

Preferably, and as illustrated in FIG. 3, the mirror 1 also comprises,at the side of the hidden face 5 of the plate 2, in particular when thelatter is circular or elliptical shaped, one or several area(s) of saidplate 2 which are in the form of a ring 12 and which have a stiffnessdifferent from that of said primary portions 6 and/or from that of saidsecondary portions 7, said ring(s) 12 having said center C as its/theircenter. Preferably, and as illustrated in FIG. 3, said ring(s) is/areformed in or attached on the thickness of the plate 2, and consist ofthickened surfaces or thinned surfaces with regards to said primary 6and/or secondary 7 portions. More preferably, said rings 12 are secantto said primary portion 6. In practice, they barely modify the radialrigidity or stiffness, but they allow reducing the errors in the shapeof said primary portions 6 or the resonance modes between said primaryportions 6.

Advantageously, each of said secondary portions 7 extends locallysubstantially along and on either side of a respective radius r′ amongsaid radiuses r. Thus, each of said primary 6 and/or secondary 7portions preferably extends locally substantially along and on eitherside of a respective radius r′ among said radiuses r. In particular, thesecondary portion 7 has a (respective) dimension L which is locallysubstantially transverse to the respective radius r′ and parallel to thereflective face 4 and which varies along the respective radius r′. Inparticular, the transverse dimension L of the secondary portion 7 mayhave dimensional properties similar to the transverse dimension of theprimary portion 6. For example, each respective transverse dimension Lincreases, starting from the center C, outwardly, along the respectiveradius r′, up to a respective primary point A located on the respectiveradius r′ and at a distance from the center C. According to theembodiment of FIG. 1, given for illustration, starting from the centerC, the respective transverse dimension L of the primary portion 6increases and then decreases along the respective radius r′, whereas therespective transverse dimension L of the secondary portion 7 onlyincreases along the respective radius r.

Advantageously, the secondary portions 7 present shapes complementarywith these of the primary portions 6. For example, as illustrated inFIG. 1, when each primary portion 6 presents a respective petal-likeshape, and the plate 2 presents a substantially circular or ellipticalgeneral shape, each secondary portion 7 is, consequently, formedadvantageously by the portion of the plate 2 separating two adjacentpetals.

Preferably, said secondary portions 7 are evenly distributed angularlyaround the center C. Preferably, the deformable mirror 1 comprises atleast eight secondary portions 7, and even at least ten secondaryportions 7.

For example, the secondary portion 7 presents a continuous structure, asillustrated in FIG. 1. According to another example, the secondaryportion 7 presents a discrete structure, as illustrated in FIG. 4.According to one embodiment, each primary 6 and/or secondary 7 portionis formed through a machining of said plate 2 performed at said hiddenface 5 side. According to one embodiment, the secondary portion 7includes a set of cavities or protrusions formed across its thickness,so as to confer the secondary portion 7 with a stiffness different fromthat of the adjacent primary portions 6. According to a particularembodiment, the secondary portions 7 are formed by respective portionsof said plate 2 which have undergone an alteration of the physicalproperties of the material(s) constituting said plate 2 therebymodifying the stiffness thereof. According to an example, each secondaryportion 7 is formed by a respective circular sector of said plate 2.According to still another example, each secondary portion 7 presents apetal-like or spindle-like general shape, as illustrated in FIG. 4.

According to another aspect, the invention concerns a method formanufacturing a deformable mirror 1. Preferably, said method isimplemented to manufacture the above-described deformable mirror 1, butmay also be implemented to make other mirrors, yet without departingfrom the scope of the invention. Hence, the previous descriptionregarding the deformable mirror 1 is applicable, mutatis mutandis, forthe method according to the invention.

According to the invention, said method includes:

-   -   on the one hand, at least one step of making a plate 2 having a        reflective face 4 and an opposite hidden face 5 and whose shape        has a center C and radiuses r, said plate 2 comprising a        plurality of primary 6 and secondary 7 portions, said secondary        portions 7 being interposed between said primary portions 6,        each of said primary portions 6 extending locally substantially        along and on either side of a respective radius r′ among said        radiuses r and having a stiffness different from that of said        adjacent secondary portions 7, and    -   on the other hand, at least one step of setting in place at        least one actuator intended to exert a force on said hidden face        5 in order to deform said plate 2.

Preferably, during said step of making said plate 2, said primaryportions 6 are made such that each of them has a dimension L which islocally substantially transverse to said respective radius r′ andparallel to said reflective face 4, and which varies along saidrespective radius r′.

Alternatively, said primary portion 6 is made such that said transversedimension L remains constant all along said respective radius r′.

Advantageously, during said step of making said plate 2, each of saidprimary portions 6 is made so that it extends locally substantiallyalong and on either side of a respective radius r′ among said radiusesr. Still more advantageously, during said step of making said plate 2,said secondary portions 7 are made so that each of them has a respectivedimension L which is locally substantially transverse to said respectiveradius r′ and parallel to said reflective face 4, and which varies alongsaid respective radius r′.

What is claimed is:
 1. A deformable mirror (1) including on the one handa plate (2) having a reflective face (4) and an opposite hidden face (5)and whose shape has a center (C) and radiuses (r), and on the other handat least one actuator intended to exert a force on said hidden face (5)in order to deform said plate (2), characterized in that said plate (2)comprises a plurality of primary (6) and secondary (7) portions, saidsecondary portions (7) being interposed between said primary portions(6), each of said primary portions (6) extending locally substantiallyalong and on either side of a respective radius (r′) among said radiuses(r) and having a stiffness different from that of said adjacentsecondary portions (7).
 2. The deformable mirror (1) according to thepreceding claim, characterized in that said shape of said plate (2) issubstantially circular or elliptical.
 3. The deformable mirror (1)according to claim 1, characterized in that said primary portion (6) hasa dimension (L) which is locally substantially transverse to saidrespective radius (r′) and parallel to said reflective face (4) andwhich varies along said respective radius (r′).
 4. The deformable mirror(1) according to claim 3, characterized in that said transversedimension (L) increases, starting from said center (C), outwardly, alongsaid respective radius (r′), up to a primary point (A) located on saidrespective radius (r′) and at a distance from said center (C).
 5. Thedeformable mirror (1) according to the preceding claim, characterized inthat the distance between said center (C) and said primary point (A)represents at least 30%, preferably at least 50%, still more preferablyat least 80%, or still more preferably the entirety of the length ofsaid respective radius (r′).
 6. The deformable mirror (1) according toclaim 3, characterized in that said transverse dimension (L) increases,starting from a peripheral end point (P) of said respective radius (r′)and/or from an edge (3) of said plate (2) toward said center (C), alongsaid respective radius (r′), up to a secondary point (B) located on saidrespective radius (r′) and at a distance from said peripheral end point(P) and/or from said edge (3).
 7. The deformable mirror (1) according tothe preceding claim, characterized in that the distance between saidperipheral end point (P) and/or said edge (3) and said secondary point(B) represents at least 30%, more preferably at least 50% of the lengthof said respective radius (r′).
 8. The deformable mirror (1) accordingto claim 4, characterized in that said primary point (A) and saidsecondary point (B) are coincident.
 9. The deformable mirror (1)according to claim 4, characterized in that said primary point (A) andsaid secondary point (B) are not coincident.
 10. The deformable mirror(1) according to the preceding claim, characterized in that saidtransverse dimension (L), along said respective radius (r′), remainssubstantially constant between said primary (A) and secondary (B)points.
 11. The deformable mirror (1) according to claim 3,characterized in that said transverse dimension (L) increases and thendecreases along said respective radius (r′).
 12. The deformable mirror(1) according to claim 1, characterized in that said primary portion (6)presents a petal-like general shape.
 13. The deformable mirror (1)according to claim 1, characterized in that said primary portion (6) hasa stiffness higher than that of said adjacent secondary portions (7).14. The deformable mirror (1) according to claim 1, characterized inthat said primary portion (6) has a stiffness lower than that of saidadjacent secondary portions (7).
 15. The deformable mirror (1) accordingto claim 1, characterized in that each of said secondary portions (7)adjacent to said primary portion (6) has the same stiffness.
 16. Thedeformable mirror (1) according to claim 1, characterized in that saidprimary portions (6) are evenly distributed angularly around said center(C).
 17. The deformable mirror (1) according to claim 1, characterizedin that it comprises at least eight primary portions (6), preferably atleast ten primary portions (6).
 18. The deformable mirror (1) accordingto claim 1, characterized in that said primary portion (6) presents acontinuous structure.
 19. The deformable mirror (1) according to claim1, characterized in that said primary portion (6) presents a thickenedsurface or a thinned surface with regards to said adjacent secondaryportions (7).
 20. The deformable mirror (1) according to the precedingclaim, characterized in that said thickened surface is formed at leastpartially by a deformable slice attached, for example bonded, on saidplate (2), thereby forming said primary portion (6).
 21. The deformablemirror (1) according to claim 19, characterized in that a machining ofsaid plate (2) is performed at said hidden face (5) side in order toform at least partially said thickened surface or said thinned surface.22. The deformable mirror (1) according to claim 1, characterized inthat said primary portion (6) presents a discrete structure.
 23. Thedeformable mirror (1) according to claim 1, characterized in that saidprimary portion (6) includes a set of cavities (9, 10) or protrusions(11) formed across its thickness, so as to confer said primary portion(6) with said stiffness different from that of said adjacent secondaryportions (7).
 24. The deformable mirror (1) according to claim 1,characterized in that said primary portions (6) are formed by portionsof said plate (2) which have undergone an alteration of the physicalproperties of the material(s) constituting said plate (2) therebymodifying the stiffness thereof.
 25. The deformable mirror (1) accordingto claim 1, characterized in that each primary portion (6) is formedfrom one or several first material(s) whereas each secondary portion (7)is formed from one or several second material(s), said first and secondmaterials having different stiffnesses.
 26. The deformable mirror (1)according to claim 2, characterized in that said primary portion (6) isformed by a respective circular sector of said plate (2).
 27. Thedeformable mirror (1) according to claim 1, characterized in that itfurther comprises a fixed support on which said plate (2) bearsperipherally.
 28. The deformable mirror (1) according to claim 1,characterized in that said actuator is designed to apply said force atsaid center (C).
 29. The deformable mirror (1) according to claim 1,characterized in that said force is exerted according to a directionlocally substantially perpendicular to said reflective surface (4). 30.The deformable mirror (1) according to claim 1, characterized in thatsaid transverse dimension (L), considered at a point (F) of saidrespective radius (r′), satisfies the equation: L=−L₀*N²*In(N²), where Nis the ratio between, on the one hand, the distance (CF) between saidcenter (C) and said point (F), and, on the other hand, the total lengthof said respective radius (r′), L₀ being a constant adjusted accordingto the number of primary portions (6) so that the latter do not overlap.31. A method for manufacturing a deformable mirror (1), characterized inthat it includes: on the one hand, at least one step of making a plate(2) having a reflective face (4) and an opposite hidden face (5) andwhose shape has a center (C) and radiuses (r), said plate (2) comprisinga plurality of primary (6) and secondary (7) portions, said secondaryportions (7) being interposed between said primary portions (6), each ofsaid primary portions (6) extending locally substantially along and oneither side of a respective radius (r′) among said radiuses (r) andhaving a stiffness different from that of said adjacent secondaryportions (7), and on the other hand, at least one step of setting inplace at least one actuator intended to exert a force on said hiddenface (5) in order to deform said plate (2).
 32. The method formanufacturing a deformable mirror (1) according to the preceding claim,characterized in that, during said step of making said plate (2), saidprimary portions (6) are made such that each of them has a dimension (L)which is locally substantially transverse to said respective radius (r′)and parallel to said reflective face (4), and which varies along saidrespective radius (r′).